Sputter Coater
The SPT-20 is a compact digital ion coater designed for high-quality SEM sample preparation. Using the DC sputtering principle, it deposits a fine-grained, conductive metal layer—such as Gold (Au), Platinum (Pt), or Palladium (Pd)—onto non-conductive samples. This essential step prevents electron charging and beam damage, ensuring superior imaging resolution in any scanning electron microscope.
Unique Features
- Automated Coating: A one-touch system manages the entire vacuum coating process, ensuring simplicity and repeatability.
- Stable Deposition: Features a current feedback function that precisely controls sputtering for uniform and stable thin-film coatings.
- Target Versatility: Compatible with a wide range of metal targets to meet diverse application requirements, from standard imaging to thin-film electrode fabrication.
- Quiet Operation: Equipped with a low-noise rotary pump, making it ideal for any laboratory environment.
Technical Specification
| Specification – SPT-20 Ion Coater | |
|---|---|
| Specification | Details |
| Dimension & Weight | 420(W) × 220(L) × 230(H) mm, 10 kg |
| Power Consumption | AC 110 or 220V, 50/60 Hz, 300W |
| Chamber Size | Ø100 mm |
| Target Size | 50 mm |
| Target Materials | Au, Pt, Pt-Pd |
| Maximum Ion Voltage | 3 kV |
| Ion Current | 0 ~ 9 mA |
| Coating Time | 10 ~ 300 sec |
| Pump | Rotary pump (50L), 14 kg |