Desciption
The RFMax Series are designed
to operate with high current density and low
contamination levels. The enhanced plasma is
entirely contained within a high-purity ceramic
zone resulting in the minimum of metallic contamination.
The sources use either a dual or triple grid
system to accelerate the ion beam towards the
target. The grid configuration is carefully
arranged to ensure minimal beam impingement
on the outer grids resulting in maximum beam
throughput and prolonged grid lifetime.
The discharge zone
is manufactured from high-quality materials
ensuring minimal contamination of the beam.
All MANTIS RFMax sources are available with
a range of automation options as well as beam
neutralization. A uniquely designed, low back-sputter
beam sampler is also available to measure
the actual beam current.
The end-user can define the
optimum gas flow by selecting from a range
of different end-plates. These plates can
be further customized to give maximum uniformity
for a given sample size, distance and angle
to the source.
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