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Nanotechnology
: NanoSys500
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Desciption
NanoSys500 is a complete nanoparticle deposition
solution in the shape of a UHV-compatible deposition
system. Users can either choose the standard
configuration or customise the system according
to their specific needs. At the heart of the
system lies the NanoGen nanoparticle deposition
source (see above) and the source positioning
and ancillary chamber components have been specifically
designed the maximise the operation of this
source. The standard sample manipulator features
sample heating, bias and rotation for 2 inch
samples. Numerous ports are available for additional
deposition sources to allow, for example, matrix
encapsulation of nanoparticles for thin-film
structures or devices as well as for viewports
and optional sample-entry load-lock systems.
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