Desciption
The MANTIS MGC75 Thermal Gas
Cracker source exploits e-beam heating technology
utilizing an oxygen-resistant filament and incorporates
a fine-bore inert cracker tube which is connected
directly to the gas inlet line.
The
highly efficient catalytic nature of the instrument
enables a substantially lower operating temperature
(<1000C), requiring minimal power (<60W)
to achieve substantial dissociation (>70%).
This is in sharp contrast to Tungsten filament
cracker designs which are incompatible with
reactive gases and use a much higher temperature
while not inducing a high dissociation.
The MGC75 body is directly
water-cooled to ensure minimal out-gassing
of the instrument. A dual filament design
allows for continuous operation over long
periods without maintenance. Because of the
excellent water-cooling and need for low gas
flow and power, the MGC75 places very little
heat and gas load into your vacuum chamber.
The MANTIS cracker is
ideal for use with hydrogen, oxygen, chlorine
and other reactive gases. The source is fully
UHV compatible employing a NW35CF flange.
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