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Desciption
MANTIS MATS-Series RF atom
sources are designed for use in the most demanding
applications. The coaxial RF coil is optimized
for power transfer to the plasma zone, with
full coupling along the entire length of the
coil, ensuring even dissociation and maximum
atomic flux. The support components are constructed
in such a manner as to avoid RF coupling from
the coil, hence further minimizing power losses.
These components are also far removed from the
coil, thus avoiding the possibility of accidental
contact with the RF coil as is more common in
other designs. Most important, the source is
extremely well cooled, thus minimising film
contamination from outgassing at hot metal surfaces.
The discharge zone
is manufactured from high-quality materials
ensuring minimal contamination of the beam.
The source incorporates a zero-ion current
configuration as standard and can be fitted
with a unique beam-thermaliser to reduce the
energy of the small fraction of energetic
neutrals which commonly emerge from all plasma-based
atom sources.
The end-user can define the
optimum gas flow by selecting from a range
of different end-plates. These plates can
be further customized to give maximum uniformity
for a given sample size, distance and angle
to the source.
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